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微桥气体质量流量传感器 AWM42100VH AWM42300V
信息类型:供应
详细描述
FEATURES
· Ranges 0...±25 and 0...±1000 sccm1
· Bidirectional sensing
· Actual mass flow sensing
· Ceramic flow tube
· Manifold mount/o-ring sealed
SPECIFICATIONS ELECTRICAL CONNECTION
Maximum ratings
Supply voltage2 8 to 15 V
typ. 10 ±0.01 V
Power consumption max. 60 mW
Temperature limits
Operating -40 to 125°C
Storage -40 to 125°C
Mechanical shock 100 g (5 drops, 6 axes)
1 2 3 4 5 6
P 1 P 2
Note:
1 sccm denotes standard cubic centimeters per minute
2 Output voltage is ratiometric to supply voltage
SERVICE
To be used with dry gases only.
The AWM42150VH is a special sensor for
hydrogen (H2) flow.
The AWM series is NOT designed for liquid
flow and will be damaged by liquid flow through
the sensor.
2/6 November 2004 / 624
AWM42000 Series
Mass flow sensor for gases
Part no. Flow range
(full scale)
Max. flow
change4
Output voltage
@ trim point
AWM42150VH ±25 sccm 5.0 l/sec 8.5 ±1.5 mV @ 25 sccm
AWM42300V ±1000 sccm 5.0 l/sec 54.7 ±3.7 mV @ 1000 sccm
PERFORMANCE CHARACTERISTICS
VS = 10 ±0.01 V, TA = 25°C
FLOW
详细描述
FEATURES
· Ranges 0...±25 and 0...±1000 sccm1
· Bidirectional sensing
· Actual mass flow sensing
· Ceramic flow tube
· Manifold mount/o-ring sealed
SPECIFICATIONS ELECTRICAL CONNECTION
Maximum ratings
Supply voltage2 8 to 15 V
typ. 10 ±0.01 V
Power consumption max. 60 mW
Temperature limits
Operating -40 to 125°C
Storage -40 to 125°C
Mechanical shock 100 g (5 drops, 6 axes)
1 2 3 4 5 6
P 1 P 2
Note:
1 sccm denotes standard cubic centimeters per minute
2 Output voltage is ratiometric to supply voltage
SERVICE
To be used with dry gases only.
The AWM42150VH is a special sensor for
hydrogen (H2) flow.
The AWM series is NOT designed for liquid
flow and will be damaged by liquid flow through
the sensor.
2/6 November 2004 / 624
AWM42000 Series
Mass flow sensor for gases
Part no. Flow range
(full scale)
Max. flow
change4
Output voltage
@ trim point
AWM42150VH ±25 sccm 5.0 l/sec 8.5 ±1.5 mV @ 25 sccm
AWM42300V ±1000 sccm 5.0 l/sec 54.7 ±3.7 mV @ 1000 sccm
PERFORMANCE CHARACTERISTICS
VS = 10 ±0.01 V, TA = 25°C
FLOW
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