实际上,大部分的编码器是装在独立旋转编码轮上的,从而避免行走过程中打滑、摩擦、变形等干扰导致的行走偏差。通过编码器信号,推焦车PLC控制系统可以精确计算到达指定位置的脉冲数,从而反馈获得推焦车当前的具体位置。在此基础上,PLC根据预设置和实际值的差值,利用自动控制理论中闭环反馈控制原理来实现推焦车的行走自动定位。
22462 BROOKS KIT SMALL WINDOW TRANS CHMBR UNDERNEATH 002-0567-01
5919 MKS INTERLOCK MODULE MF PRODUCER SE/E AMAT P/N:0190-37771 CDN500R-10
8201 ASML POWER SUPPLY PAAC 450/20 4022.471.96761
5829 NOVELLUS TOP LEVEL ELECTRO STATIC CHUCK 02-317623-00
12052 SIEMENS SIMATIC RF310R RF READER 6GT2801-1AB10
10626 VARIAN ARM SERVO CONTROLLER (RIGHT) E11001000
1191 LTX PCS OUTPUT MODULE 865-2687-00
7335 APPLIED MATERIALS LIFT HOOP 0020-22838
19097 APPLIED MATERIALS RF FILTER BOX 200MM PRODUCER ASSY, 0100-02040 0090-04309
7544 MGE PCB CARTE AROI UPS BOARD 51028161XD-2CA
7595 APPLIED MATERIALS SHIELD, COLLIMATOR UPPER 8'' 0020-22498
8549 APPLIED MATERIALS PCB GAS PANEL BOARD 0100-09153
10342 APPLIED MATERIALS PLASMA CELL BODY MICROWAVE RPS ENDPOINT 0040-01759
11896 ALLEN BRADLEY GUARDMASTER SAFETY INTERLOCK SWITCH TLS2-GD2
5438 ALLEN-BRADLEY COMPACT I/O POWER SUPPLY MODULE 1769-PB2
4377 NOVELLUS SHIELD, CHAMBER, BOTTOM, RIGHT 17-158005-00
22469 BANNER FIBER END ASSY FOR SENSORS, 23268 TGR3/8MPFMQ
8339 APPLIED MATERIALS PCB WAFER SENSOR BOARD 0100-09123
8879 TOKYO ELECTRON PCB ASSEMBLY DATA IN (LOT OF 2) MC-31108A
10326 ROFIN RESONATORMODUL 101102450
22716 TEL PCB CHAM INT-CONN BD 2 KE-1 1808-022048-11 1881-022048-12
3457 GENTEC DIGITAL LASER POWER METER TPM-310
5061 APPLIED MATERIALS MESA POWER SUPPLY 100W UPS 0190-08875 10651
7759 LAM RESEARCH PARALLELOGRAM AIM LINKAGE ASSY P/N:715-045661-1 715-059225-001
8470 APPLIED MATERIALS PCB ISOLATION AMPLIFIER (0110-00156) 0100-00156
850 APPLIED MATERIALS PLATE COVER, 8" HEATER, DXZ, PATTERNED AL 0200-36631
17651 BALDOR THREE PHASE MTR 1.5HP 1755RPM 3PH 60HZ CM3544T
4794 SCHNEIDER TSX MOMENTUM I/O BASE 24VDC - 16PT IN 16PT OUT 170ADM35010
14288 APPLIED MATERIALS CHAMBER, UPPER, A-COAT, M-DPS 0021-01421
8177 APPLIED MATERIALS PCB CHAMBER SET INTERFACE BOARD (0110-02071) 0100-02071
8851 NIKON ROBOTIC ARM WDR09178DN